发明名称 転写方法
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a transfer method which even when moving accuracy of movement of a roller or a substrate is inferior, compensates the inferior accuracy in a simple manner, thereby suppressing a variance in film thickness of ultraviolet-curable resins. <P>SOLUTION: The transfer method includes: a dummy molding preparing step of causing a sheet-like first mold 3 to face a first ultraviolet-curable resin 2 disposed on a first substrate 1 and, thereafter, curing the first ultraviolet-curable resin 2 while moving a pressing member 7 to prepare a dummy molding 6; and a transfer step of causing a pattern forming surface of a sheet-like second mold 13 in which a fine transfer pattern has been formed to face a second ultraviolet-curable resin 12 disposed on a second substrate 11, thereafter, placing the dummy molding 6 on the second mold 13, moving the pressing member 7 and, thereby, curing the second ultraviolet-curable resin 12 to transfer the transfer pattern of the second mold 13 to the second ultraviolet-curable resin 12. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP5752889(B2) 申请公布日期 2015.07.22
申请号 JP20100050871 申请日期 2010.03.08
申请人 发明人
分类号 B29C59/02;H01L21/027 主分类号 B29C59/02
代理机构 代理人
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