发明名称 露光装置
摘要 <p>The present invention provides an exposure device without prior arrangement after the inversion of a printed circuit board. The exposure device according to the present invention comprises; an exposure part 1 which exposes one side of the printed circuit board; a conveyance part 2; and an exposure part 3 which exposes the other side. The exposure part 1 and exposure part 3 are respectively equipped with an adsorption hand 5 and an adsorption hand 6, performs the conversion of a printed circuit board 99 by the absorption hand 5 in the conveyance part 2 arranged between the exposure part 1 and exposure part 3, and conveys to the adsorption hand 6. The exposure device of the present invention does not use an existing conversion device and prevents the variation of reference position of the printed circuit board in order to directly convey the printed circuit board by the adsorption hand in conveyance part. Accordingly, the exposure device does not have to arrange an arrangement part at the entrance of the exposure part located at the downstream side.</p>
申请公布号 JP5752088(B2) 申请公布日期 2015.07.22
申请号 JP20120132235 申请日期 2012.06.11
申请人 发明人
分类号 G03F7/20;H05K3/00 主分类号 G03F7/20
代理机构 代理人
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