| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a vacuum film-forming apparatus which includes a guide roll mechanism capable of preventing a flaw generation on a support and a film-forming surface in a production process of forming a multilayered thin film on a flexible support under vacuum condition through a roll method, and a high productive production method for an organic electroluminescence element with an improved light emission life using the vacuum film-forming apparatus. <P>SOLUTION: The guide roll mechanism is used for supporting the flexible support (web) and changing the transfer direction of the web between 30 to 240°in vacuum. During transfer, the flexible support contacts with the guide roll only at both edge parts of the guide roll, and moreover a mechanism for pressing the flexible support on the guide roll is provided on at least one part of the contact part. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
