发明名称 窒化ガリウムのバルク結晶とその成長方法
摘要 <p>A gallium nitride crystal with a polyhedron shape having exposed {10-10} m-planes and an exposed (000-1) N-polar c-plane, wherein a surface area of the exposed (000-1) N-polar c-plane is more than 10 mm2 and a total surface area of the exposed {10-10} m-planes is larger than half of the surface area of (000-1) N-polar c-plane. The GaN bulk crystals were grown by an ammonothermal method with a higher temperature and temperature difference than is used conventionally, and using an autoclave having a high-pressure vessel with an upper region and a lower region. The temperature of the lower region of the high-pressure vessel is at or above 550° C., the temperature of the upper region of the high-pressure vessel is set at or above 500° C., and the temperature difference between the lower and upper regions is maintained at or above 30° C. GaN seed crystals having a longest dimension along the c-axis and exposed large area m-planes are used.</p>
申请公布号 JP5751513(B2) 申请公布日期 2015.07.22
申请号 JP20100526004 申请日期 2008.09.19
申请人 发明人
分类号 C30B29/38;C01B21/06;C30B7/10 主分类号 C30B29/38
代理机构 代理人
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