| 摘要 |
Process gas(es), such as but not limited to helium, can be used in the manufacture of a variety of objects. Described in the present invention are methods to collect, reuse, and recycle the process gas(es) that are used in the production process rather than treat these materials as waste. An apparatus for recovering the process gas comprises one or more production tool, a discharge line, a valve, a recovery line, and a process line. |
