发明名称 エアーテンション装置
摘要 <p>Disclosed is an air tension device, comprising a through tube (4), further comprising a through aperture (3), wherethrough a metallic wire-bonding wire (2) is capable of passing; a support body (6) whereupon the through tube (4) is inserted, and which thereby supports the through tube (4); and a pressurized gas supply apparatus (7), which supplies pressurized gas to the through aperture (3) via a gas channel (18) that is disposed upon the through tube (4). The through aperture (3) is formed from a first through aperture (10), and a second through aperture (11), which is positioned below the first through aperture (10) and further comprised a narrow aperture portion (17) that has a smaller diameter than first through aperture (10). The diameter of the narrow aperture portion (17) is 0.070-0.100 mm, and is formed such that the ratio of the diameter of the first through aperture (10) to the diameter of the narrow aperture portion(17) is greater than or equal to 3.00 and less than 6.00. The apparatus thus avoids damaging the metallic wire (2) and applies a prescribed appropriate tension thereupon.</p>
申请公布号 JP5750644(B2) 申请公布日期 2015.07.22
申请号 JP20110547286 申请日期 2010.12.17
申请人 发明人
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
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