高純度クロロシランの製造方法および製造装置,申请号JP20120084417-传众专利搜索

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发明名称	高純度クロロシランの製造方法および製造装置
摘要
申请公布号	JP5751202(B2)	申请公布日期	2015.07.22
申请号	JP20120084417	申请日期	2012.04.03
申请人		发明人
分类号	C01B33/107	主分类号	C01B33/107
代理机构		代理人
主权项
地址

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