METHOD FOR MANAGING A SEMICONDUCTOR MANUFACTURING EQUIPMENT

摘要

Disclosed are a method for managing semiconductor manufacturing equipment and a management system thereof. The method for managing semiconductor manufacturing equipment of a facility computer comprises the steps of: indicating preventive maintenance for a chamber and components within the chamber; confirming a result of the preventive maintenance for the chamber and the components; and performing a production process using a plasma response within the chamber when the result of the preventive maintenance is normal. The confirming step of the result of the preventive maintenance may include a free-screen method to confirm the result of the preventive maintenance without the plasma response by using electric reflection coefficient values detected from the components and the chamber.