发明名称 |
ALUMINUM NITRIDE SUBSTRATE AND GROUP-III NITRIDE LAMINATE |
摘要 |
[Problem] The purpose of the present invention is to provide a highly efficient, high quality group-III nitride semiconductor element, and to provide a novel aluminum nitride substrate (aluminum nitride single crystal substrate) for fabricating the group-III nitride semiconductor element. [Solution] A substrate comprising aluminum nitride, wherein the aluminum nitride substrate has on at least a surface thereof an aluminum nitride single-crystal layer having as a principal plane a plane that is inclined 0.05°to 0.40° in the m-axis direction from the (0001) plane of a wurzite structure. |
申请公布号 |
EP2896725(A1) |
申请公布日期 |
2015.07.22 |
申请号 |
EP20130837687 |
申请日期 |
2013.09.04 |
申请人 |
TOKUYAMA CORPORATION |
发明人 |
HIRONAKA, KEIICHIRO;KINOSHITA, TORU |
分类号 |
C30B25/18;B82Y20/00;C30B29/40;C30B29/68;H01L21/02;H01L29/04;H01L29/20;H01L33/02;H01L33/16;H01L33/32;H01S5/02;H01S5/32;H01S5/343 |
主分类号 |
C30B25/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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