发明名称 熱型光検出器の製造方法
摘要 <p>A thermal detector includes a substrate, a thermal detection element and a support member. The substrate has a concave portion, a bottom surface of the concave portion forming a light-reflecting curved surface. The thermal detection element includes a light-absorbing film. The support member supports the thermal detection element with a cavity being provided between the substrate and the support member. The light-reflecting curved surface and the light-absorbing film overlap each other in plan view, the light-reflecting curved surface having a projected area in plan view larger than an area of the light-absorbing film.</p>
申请公布号 JP5750827(B2) 申请公布日期 2015.07.22
申请号 JP20100014162 申请日期 2010.01.26
申请人 发明人
分类号 G01J1/02 主分类号 G01J1/02
代理机构 代理人
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