| 摘要 |
The present invention pertains to an energy-saving silencer assembly, a semiconductor manufacturing vacuum pump with the same and a method for heating nitrogen gas. Nitrogen gas is heated using the high temperature of the surface of a silencer and supplied to the inside of the silencer so as to resolve blockage problems due to the solidification of reaction by-products while saving energy costs due to the use of additional heat sources. The energy-saving silencer assembly in the present invention as above includes: a silencer connected to a discharge side of a pump section, which pumps reaction by-product gas into a vacuum pump, so as to pass the pumped reaction by-product gas from a rear end portion to a front end portion; an outer pipe surrounding the outer peripheral surface of the silencer at an interval so as to provide a heating space between the silencer and the outer pipe; a nitrogen gas supply section for supplying nitrogen gas to the heating space; and a nitrogen gas injection section for injecting heated nitrogen gas to the inside of the silencer by the contact with the outer peripheral surface of the silencer in the heating space. |
