| 摘要 |
A gas sensor chip (1) comprises a substrate (2), a cavity (211) in the substrate, and a membrane (3) extending over the cavity (211). Furthermore, the gas sensor chip (1) comprises an arrangement comprising a thin-film solid material (4), wherein the thin-film solid material (4) is arranged between a reference electrode (5) and a sensing electrode (6), and a heating element (7) arranged in or on the membrane (3), for heating the thin-film solid material (4), the reference electrode (5), and the sensing electrode (6). The arrangement is arranged on a front side (31) of the membrane (3) or on a reverse side of the membrane (3) within the cavity (211), wherein the thin-film solid material (4) has a Li-ions conducting garnet-like crystal structure. |
