Solar cell contact formation using laser ablation

摘要

The formation of solar cell contacts using a laser is described. A method of fabricating a back-contact solar cell includes forming a poly-crystalline material layer above a single-crystalline substrate. The method also includes forming a dielectric material stack above the poly-crystalline material layer. The method also includes forming, by laser ablation, a plurality of contacts holes in the dielectric material stack, each of the contact holes exposing a portion of the poly-crystalline material layer; and forming conductive contacts in the plurality of contact holes.

主权项

1. A solar cell comprising:
a silicon substrate; a dielectric material above the silicon substrate; a poly-crystalline silicon layer above the dielectric material, the polycrystalline layer having alternating P-type and N-type doped regions and a plurality of recast poly signatures; a dielectric stack above the poly-crystalline silicon layer; a plurality of conductive contacts through the dielectric stack with each of the plurality of conductive contacts being in alignment with one of the plurality of recast poly signatures in the poly-crystalline silicon layer; and wherein the dielectric stack comprises a silicon nitride layer, and wherein the dielectric stack further comprises a silicon dioxide layer between the poly-crystalline silicon layer and the silicon nitride layer.