Functional device, method of manufacturing the functional device, physical quantity sensor, and electronic apparatus

摘要

A functional device according to an embodiment of the invention includes: an insulating substrate; a movable section; movable electrode fingers provided in the movable section; and fixed electrode fingers provided on the insulating substrate and arranged to be opposed to the movable electrode fingers. The fixed electrode fingers include: first fixed electrode fingers arranged on one side of the movable electrode fingers; and second fixed electrode fingers arranged on the other side of the movable electrode fingers. The first fixed electrode fingers and the second fixed electrode fingers are arranged to be spaced apart from each other.

主权项

1. A functional device comprising:
an insulating substrate that has a center recess and a peripheral ledge; first and second fixed electrodes provided on and over the insulating substrate, first ends of the first and second fixed electrodes being bonded on the peripheral ledge of the insulating substrate, second ends, which are opposite to the first ends, of the first and second fixed electrodes being located over a bottom of the center recess of the insulating substrate with an air gap; first and second recessed sections provided in the peripheral ledge of the insulating substrate; first and second electrode lines respectively provided in the first and second recessed sections so as to surround the first and second fixed electrodes; a first protrusion provided in the first recessed section and electrically connecting the first fixed electrode to the first electrode line, the first protrusion being made of a metal; and a second protrusion provided in the second recessed section and electrically connecting the second fixed electrode to the second electrode line, the second protrusion being made of a metal, wherein bonded bottom surfaces of the first ends of the first and second fixed electrodes are flat, the first electrode line is electrically connected to the first fixed electrode via the first protrusion, the second electrode line surrounds the first electrode line and is electrically connected to the second fixed electrode via the second protrusion, and when depths of the first and second recessed sections are respectively d1 and d2, thicknesses of the first and second electrode lines are respectively t1 and t2, and heights of the first and second protrusions are respectively h1 and h2, the following relations are satisfied:
d1≈t1+h1; andd2≈t2+h2.