Rigid probe with compliant characteristics

摘要

A probe conducts testing of a circuit. The probe includes a base coupled to a substrate. The probe also includes a cantilever attached to the base at a first end, the cantilever deflecting from a first position to a second position in which a second end opposite the first end is in contact with the substrate and to move between the second position and the first position based on movement of a compliant bump of the circuit, and a probe tip attached to the cantilever at the second end, the probe tip maintaining contact with the compliant bump of the circuit.

主权项

1. A probe to conduct testing of a circuit, the probe comprising:
a base coupled to a substrate; a cantilever attached to the base at a first end, the cantilever configured to deflect from a first position, in which a probe tip of the probe makes initial mechanical contact with a compliant bump of the circuit, to a second position in which a second end opposite the first end is in contact with the substrate and to move between the second position and the first position based on a movement of the compliant bump of the circuit; and the probe tip attached to the cantilever at the second end, the probe tip configured to maintain contact with the compliant bump of the circuit, wherein, based on additional forces applied after the initial mechanical contact, the cantilever is deformed to the second position and the compliant bump is deformed to establish electrical contact, wherein a thickness of the cantilever is between 2-5 μm, a length is between 110-150 μm, and a width is between 10-40 μm.