发明名称 Sample block holder
摘要 A sample holder assembly includes a sample tray, a base plate, a stage mount, and a calibration standard mounted onto the stage mount. Three mating structures on the bottom of the base plate mate with corresponding structures on a stage mount that is attached to the sample stage of the SEM. An optional contacting conductor provides electrical contact between the stage mount and the base plate so that charge generated on the sample by the electron beam can leave the sample through the sample conductive layer to the sample tray, to the base plate, to the stage mount, and through the grounded stage.
申请公布号 US9087673(B2) 申请公布日期 2015.07.21
申请号 US201414147884 申请日期 2014.01.06
申请人 FEI COMPANY 发明人 Barrett Matthew;Smith Michael D.;Geryk Michal;Scagnetti Paul;Tovey Richard
分类号 H01J37/20;H01J37/16 主分类号 H01J37/20
代理机构 Scheinberg & Associates, PC 代理人 Scheinberg & Associates, PC ;Scheinberg Michael O.;Kelly John B.
主权项 1. A method for using a sample holder system for a scanning electron microscope for mineralogical sample comprising: placing sample blocks into a sample tray, the sample tray having holes for positioning the sample blocks; placing a base plate behind the sample blocks to maintain the sample blocks in the sample tray, the base plate including at least three alignment structures, each alignment structure on the base plate structured to mate with a corresponding alignment structure on a stage mount, one of each mating alignment structures on the base plate or on stage mount including a hemispherical portion; fastening the base plate to the sample tray without tools; placing the assembled sample tray, base plate, and sample blocks onto the stage mount of the scanning electron microscope, the stage mount including at least three alignment structures to mate with the alignment structures on the base plate, the alignment structures on the base plate mating with the alignment structures on the stage mount mating to position and orient the sample blocks in on the stage of the charged particle beam system in a predetermined position and orientation relative to the stage mount; and operating the charge particle beam system to analyze the sample in the sample blocks, the assembled sample tray, base plate, and sample blocks resting on the stage mount without being fastened to the stage mount.
地址 Hillsboro OR US