Instrumented platform for vibration-sensitive equipment

摘要

A platform that includes a vibration sensor located within an inner core of a table. The table may have a first plate that supports a vibration-sensitive payload. The first plate may be separated from a second plate by the inner core. The sensor can be located within the core directly below the device. The sensor can be connected to an electrical connector attached to an external surface of the table. A monitor can be readily plugged into the electrical connector to obtain vibration data from the sensor. The platform may also include a damper located within the inner core to reduce vibration of the table. The damper may be an active device that is connected to control circuits located within, or outside, the inner core.

主权项

1. A method for sensing a vibration of a vibration-sensitive payload coupled to a first surface of a platform table, comprising:
positioning one or more vibration sensors and one or more dampers within an inner core of a tabletop, the inner core located between a first surface and second surface of the tabletop; coupling the vibration sensor and damper with at least one control circuit in communication with the vibration sensor and damper; sensing a vibration of the first surface of the tabletop with the vibration sensors located within the inner core of a tabletop, wherein the vibration sensor is configured to generate at least one vibration output signal in response to a vibration of the tabletop; processing the vibration output signal from the vibration sensor with the control circuit, the control circuit configured to generate an excitation signal configured to cancel the vibration of the tabletop with the control circuit in response to the vibration output signal; and controllably actuating the damper with the excitation signal form the control circuit to cancel the vibration of the tabletop.