发明名称 Nitride based heterojunction semiconductor device and manufacturing method thereof
摘要 A nitride based heterojunction semiconductor device includes a gallium nitride (GaN) layer disposed on a substrate, an aluminum (Al)-doped GaN layer disposed on the GaN layer, a Schottky electrode disposed in a first area on the Al-doped GaN layer, an AlGaN layer disposed in a second area on the Al-doped GaN layer, and an ohmic electrode disposed on the AlGaN layer. The first area is different from the second area.
申请公布号 US9087768(B2) 申请公布日期 2015.07.21
申请号 US201313759923 申请日期 2013.02.05
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 Lee Jae Hoon;Jeong Jae Hyun
分类号 H01L29/66;H01L29/205;H01L29/872;H01L29/201;H01L29/20 主分类号 H01L29/66
代理机构 McDermott Will & Emery LLP 代理人 McDermott Will & Emery LLP
主权项 1. A nitride based heterojunction semiconductor device, comprising: a gallium nitride (GaN) layer disposed on a substrate; an aluminum (Al)-doped GaN layer disposed on the GaN layer; a Schottky electrode disposed in a first area on the Al-doped GaN layer, and in direct physical contact with the Al-doped GaN layer; an AlGaN layer formed in a second area on the Al-doped GaN layer, the second area being different from the first area; and an ohmic electrode disposed on the AlGaN layer.
地址 Suwon-si, Gyeonggi-do KR