发明名称 |
Nitride based heterojunction semiconductor device and manufacturing method thereof |
摘要 |
A nitride based heterojunction semiconductor device includes a gallium nitride (GaN) layer disposed on a substrate, an aluminum (Al)-doped GaN layer disposed on the GaN layer, a Schottky electrode disposed in a first area on the Al-doped GaN layer, an AlGaN layer disposed in a second area on the Al-doped GaN layer, and an ohmic electrode disposed on the AlGaN layer. The first area is different from the second area. |
申请公布号 |
US9087768(B2) |
申请公布日期 |
2015.07.21 |
申请号 |
US201313759923 |
申请日期 |
2013.02.05 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
Lee Jae Hoon;Jeong Jae Hyun |
分类号 |
H01L29/66;H01L29/205;H01L29/872;H01L29/201;H01L29/20 |
主分类号 |
H01L29/66 |
代理机构 |
McDermott Will & Emery LLP |
代理人 |
McDermott Will & Emery LLP |
主权项 |
1. A nitride based heterojunction semiconductor device, comprising:
a gallium nitride (GaN) layer disposed on a substrate; an aluminum (Al)-doped GaN layer disposed on the GaN layer; a Schottky electrode disposed in a first area on the Al-doped GaN layer, and in direct physical contact with the Al-doped GaN layer; an AlGaN layer formed in a second area on the Al-doped GaN layer, the second area being different from the first area; and an ohmic electrode disposed on the AlGaN layer. |
地址 |
Suwon-si, Gyeonggi-do KR |