发明名称 Display element manufacturing method and manufacturing apparatus
摘要 The display element manufacturing apparatus has a transporting part, which transports a substrate in a first direction, a first alignment system, which detects fiducial marks, a second alignment system, which is arranged at a prescribed distance from the first alignment system in the first direction and detects fiducial marks, calculating parts, which detect the fiducial marks and calculate the expansion/contraction of the substrate in the first direction or the transport speed of the substrate, and a processing part, which processes a prescribed position of the substrate based on at least one of the expansion/contraction of the substrate in the first direction or the transport speed of the substrate and the fiducial marks.
申请公布号 US9086585(B2) 申请公布日期 2015.07.21
申请号 US201012978976 申请日期 2010.12.27
申请人 NIKON CORPORATION 发明人 Hamada Tomohide;Nara Kei
分类号 G01C3/16;G01C3/00;G01C3/02;G01C3/18;G02F1/1333;G02F1/13;H01L51/56 主分类号 G01C3/16
代理机构 Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P. 代理人 Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
主权项 1. A display element manufacturing method of a display element manufacturing, apparatus comprising: a transporting step which transports a flexible sheet substrate, where a plurality of fiducial marks are formed in a longitudinal direction at a predetermined interval, at a predetermined speed in the longitudinal direction with a rotating transport roller while causing the flexible sheet substrate to be in close contact with a surface of the transport roller over a predetermined angle; a detecting step which detects the fiducial marks with a first alignment system and a second alignment system of which visual fields are set in two locations respectively, the two locations being within a region where the flexible sheet substrate is in close contact with the transport roller and being separated from each other in the longitudinal direction at a predetermined distance; a calculating step which calculates an expansion or contraction of the flexible sheet substrate in the longitudinal direction based on detection results of the first alignment system and the second alignment system; and a processing step which performs a process for forming the display element in a predetermined region on the flexible sheet substrate with a processing apparatus based on the calculated expansion or contraction and positions of the fiducial marks.
地址 Tokyo JP