发明名称 |
Semiconductor memory device |
摘要 |
According to one embodiment, a semiconductor memory device includes a plurality of first interconnects extending in a first direction, a plurality of second interconnects extending in a second direction crossing the first direction, and a memory element provided between the first interconnect and the second interconnect at a portion where the first interconnect crosses the second interconnect. The memory element includes a variable resistance film and a stress generating film stacked with the variable resistance film to apply stress to the variable resistance film in a surface direction. |
申请公布号 |
US9087770(B2) |
申请公布日期 |
2015.07.21 |
申请号 |
US201314022613 |
申请日期 |
2013.09.10 |
申请人 |
Kabushiki Kaisha Toshiba |
发明人 |
Matsuo Kouji |
分类号 |
H01L47/00;H01L27/24 |
主分类号 |
H01L47/00 |
代理机构 |
Oblon, McClelland, Maier & Neustadt, L.L.P. |
代理人 |
Oblon, McClelland, Maier & Neustadt, L.L.P. |
主权项 |
1. A semiconductor memory device, comprising:
a plurality of first interconnects extending in a first direction; a plurality of second interconnects extending in a second direction crossing the first direction; and a memory element provided between the first interconnect and the second interconnect at a portion where the first interconnect crosses the second interconnect, the memory element including:
a variable resistance film; anda stress generating film stacked with the variable resistance film to apply stress to the variable resistance film in a surface direction. |
地址 |
Minato-ku JP |