发明名称 Semiconductor memory device
摘要 According to one embodiment, a semiconductor memory device includes a plurality of first interconnects extending in a first direction, a plurality of second interconnects extending in a second direction crossing the first direction, and a memory element provided between the first interconnect and the second interconnect at a portion where the first interconnect crosses the second interconnect. The memory element includes a variable resistance film and a stress generating film stacked with the variable resistance film to apply stress to the variable resistance film in a surface direction.
申请公布号 US9087770(B2) 申请公布日期 2015.07.21
申请号 US201314022613 申请日期 2013.09.10
申请人 Kabushiki Kaisha Toshiba 发明人 Matsuo Kouji
分类号 H01L47/00;H01L27/24 主分类号 H01L47/00
代理机构 Oblon, McClelland, Maier & Neustadt, L.L.P. 代理人 Oblon, McClelland, Maier & Neustadt, L.L.P.
主权项 1. A semiconductor memory device, comprising: a plurality of first interconnects extending in a first direction; a plurality of second interconnects extending in a second direction crossing the first direction; and a memory element provided between the first interconnect and the second interconnect at a portion where the first interconnect crosses the second interconnect, the memory element including: a variable resistance film; anda stress generating film stacked with the variable resistance film to apply stress to the variable resistance film in a surface direction.
地址 Minato-ku JP