| 发明名称 | Stage device and driving method thereof | ||
| 摘要 | A stage device includes a stage configured to move in an X-axis direction and a Y-axis direction, an X-axis interference reflector spaced apart from the stage in the X-axis direction, a first X-axis interferometer disposed on the stage that is configured to measure an X-axis location of the stage using the X-axis interference reflector, and an optical movable element spaced apart from the stage in the Y-axis direction that is configured to shift in the X-axis direction a path of a light beam propagating in the Y-axis direction according to movement of the stage in the X-axis direction. | ||
| 申请公布号 | US9086352(B2) | 申请公布日期 | 2015.07.21 |
| 申请号 | US201314094256 | 申请日期 | 2013.12.02 |
| 申请人 | Samsung Electronics Co., Ltd. | 发明人 | Jang Sang-Don;Park Sang-Wook;Kim Oui-Serg;Lee Hi-Kuk;Chang In-Bae |
| 分类号 | G01B11/02;G01N21/00 | 主分类号 | G01B11/02 |
| 代理机构 | F. Chau & Associates, LLC | 代理人 | F. Chau & Associates, LLC |
| 主权项 | 1. A stage device comprising: a stage configured to move in an X-axis direction and a Y-axis direction; an X-axis interference reflector spaced apart from the stage in the X-axis direction; a first X-axis interferometer disposed on the stage that is configured to measure an X-axis location of the stage using the X-axis interference reflector; and an optical movable element spaced apart from the stage in the Y-axis direction that is configured to shift in the X-axis direction a path of a light beam propagating in the Y-axis direction, according to a movement of the stage in the X-axis direction. | ||
| 地址 | Suwon-si, Gyeonggi-do KR | ||