Coordinate measuring machine

摘要

A coordinate measurement machine with a first frame element, a second frame element, a linear drive unit with a motor for moving the second frame element relative to the first frame element and a position measurement instrument, for determining a drive position of the second frame element relative to the first frame element. The drive unit has limited stiffness and dynamic deflections on movement. The machine comprises a mechanical coupler from the drive unit to the second frame element, which coupler comprises a first part fixed to the drive unit and a second part fixed to the second frame element, which parts are movable relative to each other by an active compensation actuator. The active compensation actuator is built in such a way to shift the second frame element against the drive unit to introduce a counter-displacement in such a way that the dynamic deflections are at least partially compensated.

主权项

1. A coordinate measurement machine for determination of at least one space coordinate of a measurement point on a measured object, comprising:
a first frame element; a second frame element; a linear drive unit with a motor for moving the second frame element relative to the first frame element in a direction of movement; and a position measurement instrument, for determining a drive position of the second frame element relative to the first frame element, wherein the drive unit has limited stiffness and dynamic deflections on movement, wherein a mechanical coupler from the drive unit to the second frame element, which coupler comprises a first part fixed to the drive unit and a second part fixed to the second frame element, which parts are movable relative to each other by an active compensation actuator, wherein the coupler and the active compensation actuator are built in such a way to shift the second frame element against the drive unit to introduce a counter-displacement for at least partially compensating the dynamic deflections.