FORMATION OF MASK FOR DIAMOND FILMS ETCHING

摘要

FIELD: chemistry.SUBSTANCE: mask from a dielectric or metal is produced before the growth of a diamond film on a substrate with a flat surface, which ensures the submicron size of the mask, with the following formation on the mask of the diamond film and opening of a window from the side of the substrate, which ensures access from the side of the substrate to reagents for etching the diamond film through the mask.EFFECT: formation of the submicron mask for etching the diamond film before the growth of diamond film.6 dwg, 1 tbl