EVAPORATION SOURCE FOR DEPOSITION APPARATUS

摘要

The present invention relates to an evaporation source for a deposition apparatus. The evaporation source of the present invention comprises a crucible storing an evaporation material inside; a heater part installed to surround the crucible, and applying heat; a reflective plate installed to surround the heater part; a cooling jacket installed to surround the crucible, and having a cooling fluid flow inside; and a cover plate covering the upper end of the cooling jacket, wherein the cover plate is separated from the upper end of the crucible.