发明名称 GAS-DISCHARGE EXCIMER LASER (VERSIONS)
摘要 FIELD: physics, optics.SUBSTANCE: invention relates to laser engineering. The laser includes a gas-filled housing which is fitted with a ceramic discharge chamber with an extended high-voltage flange, a high-voltage electrode and a grounded electrode, both placed extended and placed in the discharge chamber, and at least one preionisation unit. Each preionisation unit comprises a system for generating creeping discharge, which includes an extended dielectric plate having an arched shape in the cross-section. In another version of the invention, the high-voltage electrode is placed on the inner side of the high-voltage flange and is partially transparent. The preionisation unit is placed on the back side of the partially transparent high-voltage electrode. The extended walls of the ceramic discharge chamber are preferably inclined towards the high-voltage electrode, and capacitors are inclined towards the high-voltage electrode.EFFECT: high generation energy and power of the laser.24 cl, 6 dwg
申请公布号 RU2557327(C2) 申请公布日期 2015.07.20
申请号 RU20130136119 申请日期 2013.08.01
申请人 AKTSIONERNOE OBSHCHESTVO "GOSUDARSTVENNYJ NAUCHNYJ TSENTR ROSSIJSKOJ FEDERATSII TROITSKIJ INSTITUT INNOVATSIONNYKH I TERMOJADERNYKH ISSLEDOVANIJ" (AO"GNTS RF TRINITI") 发明人 KHRISTOFOROV OLEG BORISOVICH
分类号 H01S3/0977 主分类号 H01S3/0977
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