METHOD FOR SHIELDING ELECTROMAGNETIC INTERFERENCE OF STACKED MODULE

摘要

The present invention relates to a method to shield electromagnetic interference for a stacked module. The method to shield electromagnetic interference for a stacked module according to the present invention comprises the steps of: accumulating a plurality of devices and inserting a silicon substrate between a first device and a second device among the accumulated devices. A non-resistance of the silicon substrate has a value to shield noises.