PIEZOELECTRIC THIN FILM AND PRODUCTION METHOD THEREFOR, PRODUCTION APPARATUS OF PIEZOELECTRIC THIN FILM, AND LIQUID DISCHARGE HEAD

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric thin film in which the ratio of orientation of a (100) plane is high, and variation in the ratio of orientation of a (100) plane in a substrate can be reduced, and to provide a production method thereof.SOLUTION: A production method of a piezoelectric thin film includes a step for forming a coating layer by coating a substrate 5 with a coating liquid 6 containing an organic solvent and a piezoelectric thin film precursor, a step for obtaining a dry coating layer containing the piezoelectric thin film precursor by vaporizing the organic solvent from the coating layer 6 under no-wind environment, and a step for forming a piezoelectric thin film from the piezoelectric thin film precursor contained in the dry coating layer by heating it.