发明名称 SHEET STICKING DEVICE AND SHEET STICKING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a sheet sticking device and a sheet sticking method capable of preventing failure in sticking of an adhesive sheet.SOLUTION: A sheet sticking device 10 includes: a first pressing member 41 which is arranged opposite to an adherend WF by holding an adhesive sheet AS therebetween and has a pressing part 41A in which the adhesive sheet AS is pressed and stuck to the adherend WF and a deformation allowable part 41B which is continuously provided to the pressing part 41A and deformably provided therein; and a second pressing member 42 which is deformably provided and presses the pressing part 41A from the opposite side of the surface facing the adhesive sheet AS to a direction of the adherend WF.</p>
申请公布号 JP2015130380(A) 申请公布日期 2015.07.16
申请号 JP20140000433 申请日期 2014.01.06
申请人 LINTEC CORP 发明人 MENJU TOSHIAKI
分类号 H01L21/683;H01L21/301 主分类号 H01L21/683
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