LASER DRILLING METHOD AND LASER DRILLING SYSTEM

摘要

A laser drilling method and a laser drilling system. The laser drilling method comprises: a step of forming a hole boundary: outputting a pulse laser beam (100), scanning a substrate (10) where a hole is to be drilled, and forming a boundary cutting groove (20) of a preformed hole; a step of heating a material in the hole: outputting a CO2 laser beam (200), aligning the CO2 laser beam (200) with the preformed hole, and heating a substrate material (30) of the preformed hole for a preset period of time; and a step of forming a hole: cooling the substrate material (30) of the preformed hole, so that the substrate material (30) is deformed and then is disengaged from the substrate (10) where the hole is to be drilled.