发明名称 MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要 <p>A method for manufacturing a semiconductor device is simply and easily performed. In the method for manufacturing the semiconductor device, a liner film (LF1) is formed on an interlayer dielectric layer (IL) to cover a photodiode (PH) in each of a plurality of areas (AR) on which each pixel to detect light of a different color is formed. After that, an opening part (OP) reaching the inside of the interlayer dielectric layer (IL) by passing through the liner film (LF1) is formed. Also, in each area (AR), the liner film (LF1) is formed to make the thickness of the liner film (LF1) different. The height position of the lower side of the opening part (OP) in the area with the liner film (LF1) of the thin thickness is lower than the height position of the lower side of the opening part (OP) in the area with the liner film (LF1) of the thick thickness.</p>
申请公布号 KR20150083016(A) 申请公布日期 2015.07.16
申请号 KR20140185767 申请日期 2014.12.22
申请人 RENESAS ELECTRONICS CORPORATION 发明人 MAEKAWA KOJI
分类号 H01L27/14 主分类号 H01L27/14
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