| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of adjusting a camera position which allows securing a diameter detecting accuracy at a stage prior to a start of pulling a single crystal, and a camera position adjusting jig.SOLUTION: In a diameter detecting apparatus which is installed outside of a chamber of a single crystal manufacturing apparatus for pulling a single crystal from silicon melt using a Czochralski method, and uses a camera to take an image of a crystal breeding part through an observation port of the upper part of the chamber to detect a diameter of the single crystal, the invention relates to a camera position adjusting method to adjust a camera mounting position and a camera mounting angle. The camera adjusting method disposes a display 2 showing a circle 5 having a known diameter such that a display surface of the circle 5 coincides with melt surface height, detects a diameter value of the circle 5 by the camera, and adjusts a camera mounting position and a camera mounting angle such that the detected diameter value coincides with the known diameter value by adjusting the camera adjusting position and the camera mounting angle. |
