| 发明名称 |
SOLVENT FOR TREATING AROMATIC POLYMER AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE |
| 摘要 |
According to the present invention, a solvent for treating an aromatic polymer comprises at least one species of C8-C11 aromatic hydrocarbons, thereby effectively treating an aromatic polymer, particularly, effectively treating an aromatic polymer coated on the outer and back sides of a semiconductor substrate. |
| 申请公布号 |
KR20150082982(A) |
申请公布日期 |
2015.07.16 |
| 申请号 |
KR20140002591 |
申请日期 |
2014.01.08 |
| 申请人 |
SKC CO., LTD. |
发明人 |
RYOU, JOON SUNG;JEONG, SUN HYOUNG;OH, SEUNG BAE;KIM, SANG TAI;KIM, YOUNG HO |
| 分类号 |
G03F7/42;G03F7/34;H01L21/027 |
主分类号 |
G03F7/42 |
| 代理机构 |
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