发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To provide a semiconductor device having a resistance element with small variations in a resistance value with respect to a design value.SOLUTION: A semiconductor device comprises: a plurality of resistance elements 11 disposed on a semiconductor substrate 1 so as to be aligned at intervals; a pair of electrodes 12 disposed at intervals in each resistance element 11; and a protective layer 13 that has an opening 14 exposing each electrode 12 and covers the plurality of resistance elements 11. In the protective layer 13, the openings exposing the electrodes 12 in adjacent resistance elements 11 are disposed out of alignment.</p>
申请公布号 JP2015130428(A) 申请公布日期 2015.07.16
申请号 JP20140001706 申请日期 2014.01.08
申请人 FUJITSU SEMICONDUCTOR LTD 发明人 YOSHIMURA TETSUO
分类号 H01L21/822;H01L21/8234;H01L27/04;H01L27/06 主分类号 H01L21/822
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