METHOD AND APPARATUS FOR GROWING MONOCRYSTALLINE INGOTS

摘要

A manufacturing method of a monocrystalline ingot of an embodiment comprises the steps of: sensing a diameter of a monocrystalline ingot; calculating a pulling speed of a monocrystalline ingot using the sensed diameter, a target diameter of a monocrystalline ingot, and a target pulling speed; correcting the calculated pulling speed when the sensed diameter is needed to correct; and increasing the monocrystalline ingot in accordance with the corrected pulling speed.