发明名称 THIN FILM FORMING DEVICE AND THIN FILM FORMING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide new thin film forming device and thin film forming method.SOLUTION: A thin film forming device according to one embodiment comprises: a first storage unit; a first nozzle unit; a first light-irradiating unit; a second storage unit; a second nozzle unit; and a second light-irradiating unit. The first storage unit stores a first organic material. The first nozzle unit is connected to the first storage unit and sprays the first organic material stored in the first storage unit. The first light-irradiating unit is disposed so as to be adjacent to the first nozzle unit and irradiate light having a wavelength for curing the sprayed first organic material. The second storage unit stores a second organic material. The second nozzle unit is disposed so as to be adjacent to the first nozzle unit, is connected to the second storage unit, and sprays the second organic material stored in the second storage unit. The second light-irradiating unit is disposed so as to be adjacent to the second nozzle unit and irradiates light having a wavelength for curing the sprayed second organic material.</p>
申请公布号 JP2015130315(A) 申请公布日期 2015.07.16
申请号 JP20140097427 申请日期 2014.05.09
申请人 SAMSUNG DISPLAY CO LTD 发明人 RI MASAHIRO;KIM SUN HOE;JO CHEOL RAE;KYO MEISHU
分类号 H05B33/10;H01L51/50;H05B33/04 主分类号 H05B33/10
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