| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an MEMS sensor capable of suppressing output fluctuations due to thermal hysteresis, even when an aluminum-based wiring layer is formed.SOLUTION: Gold electrode pads 16a, 16b, 16c, 16d are formed at four corners of a square MEMS sensor. The electrode pads 16a, 16b, 16c, 16d and detection elements 15a, 15b, 15c have electrical continuity in connection wiring layers 20, 25. The connection wiring layers 20, 25 are composed of aluminum lower wiring layers 21, 26 and gold upper wiring layers 22, 27. Since the aluminum lower wiring layers 21, 26 are disposed with good balance in an appropriate length, it is possible to suppress output fluctuations due to residual stresses caused by thermal hysteresis.</p> |
