| 摘要 |
<p>PROBLEM TO BE SOLVED: To suppress the bumping of a chemical agent in a storage container with no decrease in cleanliness of the chemical agent in the storage container.SOLUTION: A concentrator 1, which is a concentrator comprising a storage container 3 that stores a chemical agent 4 containing a solvent, a decompression part 5 that can decompress the interior of the storage container 3, and a line L1 that connects the storage container 3 with the decompression part 5 and evaporating the solvent contained in the chemical agent 4 stored in the storage container 3 to concentrate the chemical agent 4 by decompressing the interior of the storage container 3 with the decompression part 5, keeps a gas supply part 7 that can supply a gas to the line L1 connected with the line L1 between the storage container 3 and the decompression part 5.</p> |
