| 摘要 |
PROBLEM TO BE SOLVED: To provide an anti-reflective coating composition for preventing a pull-back phenomenon, in which an anti-reflective coating layer tears on a corner of a pattern of a substrate during a heat curing process, and improving gap-filling performance of the pattern.SOLUTION: An anti-reflective coating composition comprises (a) a polymer and (b) a solvent. The polymer comprises (a-1) at least one unit derived from a compound having an aromatic group and constituting the main chain of the polymer, and (a-2) a unit derived from a crosslinker and attached to the main chain. The content of the crosslinker that has not attached to the main chain of the polymer is greater than 0 wt.% and less than or equal to 5 wt.% based on the total weight of solid content in the composition. |
