发明名称 SHAPE MEASUREMENT DEVICE, ATTITUDE CONTROL DEVICE, STRUCTURE MANUFACTURING SYSTEM, AND SHAPE MEASUREMENT METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a shape measurement device, an attitude control device, a structure manufacturing system, and a shape measurement method which reduce measurement errors attributed to the shape of the surface of an object to be measured, and accurately measure the shape of the object.SOLUTION: A shape measurement device includes: an illumination part 11 for radiating by an illumination optical system 112 a plurality of light rays at different positions on a surface 21 of an object 20 to be measured; an imaging part 12 for taking images of the object 20 to be measured having the plurality of light rays radiated thereon by an imaging optical system 122 disposed in the direction different from the radiation direction; a control part for transmitting a control signal for controlling the relative direction of the object 20 to be measured with respect to the illumination part 11 or the imaging part 12 on the basis of the position of an image taken by the imaging part 12 with respect to each of the plurality of light lays; and a shape calculation part for calculating the shape of the surface 21 of the object to be measured having at least one of the plurality of light rays radiated thereon.</p>
申请公布号 JP2015129680(A) 申请公布日期 2015.07.16
申请号 JP20140001296 申请日期 2014.01.08
申请人 NIKON CORP 发明人 YAMAGUCHI MASAYA
分类号 G01B11/24 主分类号 G01B11/24
代理机构 代理人
主权项
地址