发明名称 |
DOPED GALLIUM NITRIDE HIGH-ELECTRON MOBILITY TRANSISTOR |
摘要 |
Embodiments include high electron mobility transistors (HEMTs) comprising a substrate and a barrier layer including a doped component. The doped component may be a germanium doped layer or a germanium doped pulse. Other embodiments may include methods for fabricating such a HEMT. |
申请公布号 |
US2015200287(A1) |
申请公布日期 |
2015.07.16 |
申请号 |
US201414157245 |
申请日期 |
2014.01.16 |
申请人 |
TriQuint Semiconductor, Inc. |
发明人 |
Beam, III Edward A.;Xie Jinqiao |
分类号 |
H01L29/778;H01L21/02;H01L29/205 |
主分类号 |
H01L29/778 |
代理机构 |
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代理人 |
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主权项 |
1. An apparatus comprising:
a substrate; a gallium nitride (GaN) buffer layer disposed on the substrate; and an aluminum gallium nitride (AlGaN) barrier layer disposed on the GaN buffer layer, the AlGaN barrier layer including a doped component. |
地址 |
Hillsboro OR US |