发明名称 DOPED GALLIUM NITRIDE HIGH-ELECTRON MOBILITY TRANSISTOR
摘要 Embodiments include high electron mobility transistors (HEMTs) comprising a substrate and a barrier layer including a doped component. The doped component may be a germanium doped layer or a germanium doped pulse. Other embodiments may include methods for fabricating such a HEMT.
申请公布号 US2015200287(A1) 申请公布日期 2015.07.16
申请号 US201414157245 申请日期 2014.01.16
申请人 TriQuint Semiconductor, Inc. 发明人 Beam, III Edward A.;Xie Jinqiao
分类号 H01L29/778;H01L21/02;H01L29/205 主分类号 H01L29/778
代理机构 代理人
主权项 1. An apparatus comprising: a substrate; a gallium nitride (GaN) buffer layer disposed on the substrate; and an aluminum gallium nitride (AlGaN) barrier layer disposed on the GaN buffer layer, the AlGaN barrier layer including a doped component.
地址 Hillsboro OR US