| 发明名称 |
MICRO-ELECTRO-MECHANICAL-SYSTEM DEVICE WITH GUARD RING AND METHOD FOR MAKING SAME |
| 摘要 |
The present invention discloses a MEMS device with guard ring, and a method for making the MEMS device. The MEMS device comprises a bond pad and a sidewall surrounding and connecting with the bond pad, characterized in that the sidewall forms a guard ring by an etch-resistive material. |
| 申请公布号 |
US2015197420(A1) |
申请公布日期 |
2015.07.16 |
| 申请号 |
US201514670766 |
申请日期 |
2015.03.27 |
| 申请人 |
Hsu Hsin Hui;Lee Sheng Ta;Wang Chuan Wei |
发明人 |
Hsu Hsin Hui;Lee Sheng Ta;Wang Chuan Wei |
| 分类号 |
B81C1/00 |
主分类号 |
B81C1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
HsinChu TW |
