发明名称 FILM FORMATION DEVICE AND FILM FORMATION METHOD
摘要 <p>Nozzles (4) of an inkjet head (3) are given an array width length not less than a maximum length in the width direction of a film formation surface (2A) of a substrate (2) when the substrate (2) moves in a relative manner. From among the plurality of nozzles (4), the number of nozzles (4) that discharge a film solution (6) is variably controlled so as to stop the adhesion of the discharged film solution (6) at a boundary between the film formation surface (2A) of the substrate (2) and an outer peripheral end section (2c) in order to inhibit the film solution (6) from adhering toward a reverse surface (2c) from the outer peripheral end section (2b) of the substrate (2) in the intervening time until the relative movement of the two (2, 2A) is completed.</p>
申请公布号 WO2015104829(A1) 申请公布日期 2015.07.16
申请号 WO2014JP50299 申请日期 2014.01.10
申请人 KABUSHIKI KAISHA ISHII HYOKI 发明人 KOZAWA YASUHIRO;YOSHIOKA MASAHIRO
分类号 B05C5/00;B05D1/26 主分类号 B05C5/00
代理机构 代理人
主权项
地址