| 摘要 |
A vacuum adsorption apparatus is disclosed. The vacuum adsorption apparatus according to an aspect of the present invention comprises: an adsorption member vacuum-adsorbed by a vacuum chamber formed therein onto a surface-to-be-adsorbed; and an adjustment member coupled to the adsorption member so as to form a vacuum chamber, wherein the adsorption member comprises a first hard part to which the adjustment member is coupled and of which the location may be raised by the adjustment member, a deformation part of which one end is coupled to an end of the first hard part and of which the shape can be changed, and a second hard part coupled to the other end of the deformation part to support the deformation part and located in the outside of the first hard part. |
