METHOD AND APPARATUS FOR DECOUPLING ENVIRONMENTAL AND MODAL DEPENDENCIES IN INERTIAL MEASUREMENT DEVICES

摘要

A resonant gyroscope apparatus has a decoupling mechanism implemented with spring-like flexure members to effectively isolate an axis-symmetric bulk-acoustic wave (BAW) vibratory gyroscope from its substrate, thereby minimizing the effect that external sources of error have on offset and scale-factor. The spring-like structure enables degeneracy of in-plane resonance modes of the annulus and aids in decoupling the in-plane and out-of-plane resonance modes of the resonant annulus, thereby enabling the mode-matched and/or near mode-matched operation of the structure as a vibratory gyroscope in the pitch, roll and yaw-modes. In various embodiments, the decoupling mechanism may be coupled to either an interior or exterior perimeter of an annulus shaped resonator element of the gyroscope