| 摘要 |
PROBLEM TO BE SOLVED: To provide a slit nozzle cleaning apparatus which enhances reliability furthermore in the cleaning of a slit nozzle, to provide a coating apparatus for work including the slit nozzle cleaning apparatus, and to provide a slit nozzle cleaning method using the slit nozzle cleaning apparatus.SOLUTION: Even if a cleaning solution (e.g., water) having higher surface tension or lower steam pressure when compared with a solvent is used, the cleaning solution can be prevented from adhering to a slit nozzle by abutting a scraper, to which the cleaning solution is adhering, because the cleaning solution is removed from the scraper by drying. |
