| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a detoxifying apparatus that can prevent the occurrence of a back fire phenomenon and a circulation flow of high temperature gas, and is favorable to improve the efficiency of operating a device. <P>SOLUTION: The detoxifying apparatus 1 includes: a combustion furnace 2 for isolating damage by combustion of gas exhausted from a vacuum pump P as treatment target gas; a regular line pipe 3 for guiding gas exhausted from the vacuum pump P as the treatment target gas to the combustion furnace 2; a bypass line pipe 5 for guiding the gas exhausted from the vacuum pump P to a part other than the combustion furnace 2; a line switching valve 6 for selectively switching between the regular line pipe 3 and the bypass line pipe 5; and a gas supply means 8 as a means for forming a gas flow from the line switching valve 6 to the combustion furnace 2 in the regular line pipe 3, by supplying inert gas into the regular line pipe 3. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
