| 摘要 |
<p>A displacement detection apparatus includes a scale 115 on which marks are disposed, first and second position detection sensors 111 and 112 detecting positions of the marks 110, and a processor 409 performing a calculation processing of an output signal from each of the first and second position detection sensors 111 and 112. The first and second position detection sensors 111 and 112 are disposed at a distance L from each other to be movable relative to the scale 115. The processor 409 calculates a correction value P' of a mark pitch P of the marks 110 using the distance L, a first time T PK required for K marks of the marks 110 to pass a detection position, and a second time T L required for a specific mark of the marks 110, which are measured at the same time of the first time T PK , to move the distance L.</p> |
