| 摘要 |
<p>Disclosed is a hybrid material superior in heat resistance and film formability (thin film forming properties) formed from an organic-inorganic polymer hybrid. The target hybrid material is constituted by an organic-inorganic polymer hybrid in which a polymer phase formed from a polybenzoazole having some atomic group represented by a prescribed chemical formula within repeated units and an inorganic oxide phase forming a unit through an organic group represented by a prescribed chemical formula.</p> |
