| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a relatively inexpensive coating liquid for boron diffusion that prevents variations in the resistance value of a semiconductor device in which boron has been diffused, can diffuse boron with high concentration, and can further avoid the contamination of the semiconductor device by sodium. <P>SOLUTION: The coating liquid for boron diffusion contains: (a) a boron compound; (b) a polyvinyl alcohol based resin having a sodium content of≤10 ppm; and (c) water. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
