VACUUM PUMP SYSTEM FOR EVACUATING A CHAMBER, AND METHOD FOR CONTROLLING A VACUUM PUMP SYSTEM

摘要

A vacuum pump system for evacuating a chamber (10) has a main pump system (12, 14) which is connected to the chamber (10). An auxiliary pump system (20) is connected to the main pump system (12, 14), wherein the auxiliary pump system (20) has an ejector pump. Regulating of the rotational speed of the at least one pump of the main pump system (12, 14) takes place with the aid of the method according to the invention depending on a pressure which is measured at the outlet (16) or at the inlet (50) of the main pump system (12, 14).